BluGlass enters collaboration with AIXTRON
AIXTRON SE (Herzogenrath, Germany), a leading provider of deposition equipment to the semiconductor industry, announced its collaboration with the Australian technology innovator BluGlass Limited to evaluate BluGlass’ unique remote plasma deposition (RPCVD) technology.
BluGlass has selected the AIX 2800G4-HT system for the scaling of RPCVD to mass production capacities. AIXTRON’s Planetary Reactor is reported to deliver class leading semiconductor film uniformity due to its proprietary dual axis of wafer rotation during deposition. RPCVD technology enables low temperature deposition of III-V nitrides which could potentially improve the performance of devices. The first integration of RPCVD onto the AIX 2800G4-HT will be conducted at BluGlass’ Silverwater facility in Sydney, Australia.
BluGlass’ managing director Giles Bourne said: “We are very pleased to have the support from AIXTRON for this major scaling project of our technology. This is an important step towards demonstrating the commercial viability of RPCVD in large scale manufacturing.”
AIXTRON’s group innovation officer Dr Ken Teo added: “At AIXTRON, we are constantly striving to bring novel technologies onto our platforms in order to provide our customers with advanced capabilities. We want to explore the potential of RPCVD technology for low temperature deposition of nitride layers which may open up new possibilities for optoelectronic devices. We look forward to working with BluGlass in integrating RPCVD and evaluating the technology.”
Caption: BluGlass uses remote plasma chemical vapour deposition (RPCVD) for the manufacture of high-performance LEDs and other devices. (photo: BluGlass)